- All sections
- C - Chemistry; metallurgy
- C23C - Coating metallic material; coating material with metallic material; surface treatment of metallic material by diffusion into the surface, by chemical conversion or substitution; coating by vacuum evaporation, by sputtering, by ion implantation or by chemical vapour deposition, in general
- C23C 14/35 - Sputtering by application of a magnetic field, e.g. magnetron sputtering
Patent holdings for IPC class C23C 14/35
Total number of patents in this class: 2392
10-year publication summary
192
|
181
|
208
|
203
|
210
|
216
|
232
|
225
|
215
|
55
|
2015 | 2016 | 2017 | 2018 | 2019 | 2020 | 2021 | 2022 | 2023 | 2024 |
Principal owners for this class
Owner |
All patents
|
This class
|
---|---|---|
Applied Materials, Inc. | 16587 |
260 |
ULVAC, Inc. | 1448 |
91 |
Oerlikon Surface Solutions AG, Pfaffikon | 556 |
71 |
Canon Anelva Corporation | 676 |
55 |
Tokyo Electron Limited | 11599 |
52 |
Taiwan Semiconductor Manufacturing Company, Ltd. | 36809 |
48 |
Beijing Naura Microelectronics Equipment Co., Ltd. | 430 |
45 |
Evatec AG | 152 |
35 |
Cardinal CG Company | 226 |
31 |
Dyson Technology Limited | 3124 |
27 |
Walter AG | 240 |
25 |
Saint-Gobain Glass France | 3641 |
24 |
Boe Technology Group Co., Ltd. | 35384 |
22 |
Nitto Denko Corporation | 7879 |
18 |
Samsung Display Co., Ltd. | 30585 |
16 |
Vapor Technologies, Inc. | 63 |
15 |
Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. | 6132 |
15 |
IonQuest Corp., FORMERLY IonQuest LLC | 16 |
15 |
Centre National de La Recherche Scientifique | 9632 |
14 |
SPTS Technologies Limited | 131 |
14 |
Other owners | 1499 |